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Reliability is a key parameter for the eventual prevalence of microelectromechanical systems (MEMS) as either sub-components or as standalone products. Traditionally, micromachined components have been made by separating the micromachined chip design and fabrication processes from the packaging and reliability issues. This “evolutionary” partitioning of microsystems has led to long incubation t...
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ژورنال
عنوان ژورنال: Journal of microelectromechanical systems
سال: 2023
ISSN: ['1941-0158', '1057-7157']
DOI: https://doi.org/10.1109/jmems.2023.3244442